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Preparation of Standards for Thin Film Thickness Measurements by Energy Dispersive X-ray Analysis

Volume 35, Number 3 (June 1981) Page 324-328

Kammlott, G.W.

Thin film measurements by energy dispersive X-ray analysis require appropriate standards. A method for preparing such standards by deposition of thin films and direct measurements of their thickness with a scanning electron microscope is described. These standards have been used to measure thickness of corrosion layers to within ±8.0 nm accuracy.