holder

The following is an abstract for the selected article. A PDF download of the full text of this article is available here. Members may download full texts at no charge. Non-members may be charged a small fee for certain articles.


Tertiary Interferograms in Fourier Transform Spectroscopy

Volume 35, Number 5 (Oct. 1981) Page 473-475

Baghdadi, Aslan; Forman, Richard A.


Multiple passes, both within a semiconductor specimen and between the specimen surface and the interferometer, give rise to a series of extraneous "tertiary" interferograms in a Fourier transform spectrophotometer. These tertiary interferograms can lead to a possible error on the order of 1% in the measurement of the impurity content of a silicon wafer. However, this effect can be eliminated by a straightforward manipulation of the interferogram prior to transformation.