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A Review of Instrumentation Used to Generate Microwave-Induced Plasmas

Volume 38, Number 6 (Dec. 1984) Page 755-763

Goode, Scott R.; Baughman, Kim W.

The development and the design of instrumentation used to generate a microwave-induced plasma (MIP) is reviewed. Microwave power generators, coupling devices, discharge tubes, and their influence on the spectrochemical utility of the MIP are described. A complete analysis of the widely used TM010 cavity is also presented.