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Energy Transfer and Ionization Processes in a Reduced-Pressure Argon ICP

Volume 41, Number 7 (Oct. 1987) Page 1216-1219

Fannin, H.B.; Seliskar, C.J.

The spectral characteristics of an argon/helium ICP operated at reduced-pressure are presented. The state population distributions deduced from quantitative intensity measurements for plasma neutral and cationic species suggest that the argon/helium plasma is essentially an argon plasma with respect to energy stratification. Comparisons are made with recently reported results for an atmospheric-pressure argon/helium ICP.