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Raman Images of Stress and Structural Variations in Laser-Annealed Polysilicon

Volume 56, Number 9 (Sept. 2002) Page 1122-1125

Gardiner, Derek J.; Parr, Andrea A.

Stress and structural variations in laser-annealed polysilicon have been investigated using Raman microscopy. Stress images derived from Raman shift and bandwidth data at sub-micrometer resolution have been generated for samples with and without phosphorous implantation as a function of anneal laser fluence. Large variations in stress leading to cracking and delamination were observed for the P-implanted samples, which were essentially absent in the unimplanted samples.