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Structure and Dynamics of a Magnetron DC Arc Plasma

Volume 44, Number 1 (Jan. 1990) Page 76-83

Slinkman, David; Sacks, Richard


A direct-current are plasma generator is described which uses a concentric electrode configuration and a magnetic field parallel to the electrode axis to obtain rotation of the are current channel at a frequency in the 1-3 kHz range. The anode is a hollow graphite cylinder, and the cathode is a thoriated tungsten wire. A magnetic field of several hundred gauss is obtained from one or more ring-shaped permanent ceramic magnets. For a 5-mm anode diameter, the plasma is diffuse, and the current channel has the form of a thin radial sheet which undergoes relatively small periodic perturbations at the rotational frequency. Design features, performance data, and plasma structure are considered.