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Quantum-Statistical Modeling of Mixed Inert Gas ICPs

Volume 44, Number 7 (Aug. 1990) Page 1143-1146

Fannin, H.B.


Relative populations of excited neutral and ionic states in reduced-pressure ICPs supported by a binary mixture of helium and an additional inert gas have been shown to obey Fermi-Dirac statistical counting. A single thermodynamic temperature of 2000 K is sufficient to define the distribution of both neutral and ionic state populations. High-energy states of ionic species exhibit a "blending" between Fermi-Dirac and Boltzmann behavior. Agreement between measured relative populations and the Fermi-Dirac distribution is ~1% overall.