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Determination of Zr and Ti in 3- mu m-Thick ZrTiN Ceramic Coating Using Laser Ablation Inductively Coupled Plasma Atomic Emission Spectrometry

Volume 51, Number 7 (July 1997) Page 1037-1041

Kanicky, Viktor; Musil, Jan; Mermet, Jean-Michel

Analysis of 3- mu m-thick ZrN, TiN, and ZrTiN ceramic coatings on a high-speed steel substrate by laser ablation inductively coupled plasma atomic emission spectrometry (LA-ICP-AES) is described. A Nd:YAG laser was used in the Q-switched mode and operated at 355 nm and 5 mJ. Ablation patterns were obtained on the target surface by moving the ablation chamber with respect to the laser beam by means of an X-Y translator. Control of the depth of penetration was obtained by successively performing a limited number of cycles. Transient signals were obtained and their peak areas were used for the construction of calibration graphs based on the concentrations determined by energy-dispersive X-ray (EDX) analysis. An erosion rate of 0.1 mu m per cycle was observed. Crater shape and depth, temporal behavior, and reproducibility of the signals are described.