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Depth Profiling of Stratified Layers Using Variable-Angle ATR

Volume 50, Number 8 (Aug. 1996) Page 1082-1088

Shick, Robert A.; Koenig, Jack L.; Ishida, Hatsuo


It is shown that variable-angle attenuated total reflectance Fourier transform infrared spectroscopy is a viable technique to recover depth profile information on the molecular level. A number of known step profiles are measured to determine the limits of applicability for this method. Thickness results obtained by using the internal reflection technique are compared with thickness determination with the use of a profilometer.